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Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator
First author: Wu, GQ; Xu, DH; Xiong, B; Wang, YL
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Issue: 19
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PubYear: 2012
Volume: 101
Unit code: 172231
Publication name: APPLIED PHYSICS LETTERS
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Departmens of first author: Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
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