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Nano-scale gap filling and mechanism of deposit-etch-deposit process for phase-change material
First author: Ren, WC; Liu, B; Song, ZT; Xiang, YH; Wang, ZT; Zhang, BC; Feng, SL
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Issue: 11
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PubYear: 2012
Volume: 21
Unit code: 172231
Publication name: CHINESE PHYSICS B
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Departmens of first author: Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
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