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MEMS Vertical Probe Cards with Both Line-arrayed and Area-arrayed Ultra-dense Metal Tips for Wafer-level IC Testing
First author: Fei Wang, Rong Cheng, Xinxin Li
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Page number: 503-506.
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PubYear: 2008-12-18
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Unit code: 172231
Publication name: IEDM 2008---IEEE International Electron Device Meeting 2008
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