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Fabrication and phase transition of long-range-ordered, high-density GST nanoparticle arrays
First author: Dai, Ming (1)
Abstract: We use a monolayer of self-assembled polystyrene (PS) spheres (220 nm in diameter) as a reactive ion etching (RIE) mask to fabricate large-scale (more than 1 cm2), long-range-ordered, high-density Ge1Sb 2Te4 (GS
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Page number: 2442-2446
Issue: 9
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PubYear: 2008-12-17
Volume: 36
Unit code: 172231
Publication name: Nanotechnology
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Paper type: Journal article (JA)
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ISSN: (1) State Key Lab. of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China